FBCVD Supporting System Upgrade for a Polysilicon Powder Enterprise
New Energy Materials
Background
A polysilicon powder enterprise's in-use fluidized-bed supporting systems were aging, with low dosing accuracy, large temperature fluctuation and non-compliant off-gas treatment, directly affecting product quality and environmental acceptance. The customer commissioned a full upgrade of the gas dosing, off-gas and temperature-control systems without stopping production.
Customer Requirements
| Item | Specification |
|---|---|
| Dosing accuracy | +/-1% |
| Temperature fluctuation | +/-5 C |
| Off-gas emissions | Compliant |
| Retrofit mode | Staged shutdown, continuous handover |
| Data logging | Auto collection and traceability |
Solution
Songrui delivered a full FBCVD supporting system upgrade: high-precision mass flow controllers, multi-zone temperature control and centralized PLC control; off-gas treated in three stages (scrubbing + combustion + adsorption). The system provides full-process data collection, alarm and traceability, seamlessly interfacing with the existing reactor body.
Results
| Indicator | Before | After |
|---|---|---|
| Dosing accuracy | +/-3% | +/-0.8% |
| Temperature fluctuation | +/-8 C | +/-2 C |
| Off-gas emissions | Non-compliant | Compliant |
| Downtime | Frequent | Clearly reduced |
Customer feedback: stable operation after upgrade, compliant emissions, product quality fluctuation significantly narrowed.