Polysilicon & Powder Preparation
Fluidized bed CVD technology has unique advantages in polysilicon granule preparation and various functional powder production. We provide reactors and engineering services.
Industry Challenges
Gas-phase powder deposition demands high control of reactor flow field, temperature field and particle circulation, making scale-up difficult.
FBCVD Solution
Based on fluidized bed gas-solid flow and heat/mass transfer design experience, we provide reactor design, pilot validation and scale-up support.
流场优化设计
抑制颗粒聚团与扬析，保证稳定操作窗口。
中试验证平台
中试级反应器支持客户工艺验证与参数摸索。
工程放大支持
从机理分析到设备放大的全流程技术服务。
定制内件
气体分布器、换热内件按工艺定制。
Related Products
SR-L Lab-scale FBCVD Reactor
Bench-top lab FBCVD reactor for catalyst evaluation, deposition process exploration and small-batch tests.
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SR-M Pilot-scale FBCVD Reactor
Pilot FBCVD reactor with wide adjustable parameter ranges for process validation and scale-up, bridging lab and production.
View Details →SR-P Production-scale FBCVD Reactor
Continuous FBCVD reactor for large-scale Si-C anode and CNT production with large batch capacity, uniform coating and continuous feeding.
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FBCVD Supporting Systems (Gas/Tail-gas/Temp.)
Gas supply, tail gas treatment and temperature control systems for FBCVD reactors, ensuring safe, clean and stable operation.
View Details →Need fluidized bed reactor selection advice or process solutions? Contact us anytime.
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