SR-M Pilot-scale FBCVD Reactor
Pilot FBCVD reactor with wide adjustable parameter ranges for process validation and scale-up, bridging lab and production.
| Batch Capacity | 5-50 kg/batch |
| Deposition Temp. | 400-1100 ℃ |
| Temp. Accuracy | ±2 ℃ |
Product Introduction
Positioning
The SR-M series serves pilot scale-up needs of research institutes and material companies, with 5-50 kg batch capacity reproducing production-reactor flow and temperature fields.
Features
- Wide adjustable ranges of temperature, gas flow and pressure
- Modular design for quick distributor/internal changes
- Complete data acquisition for process modeling
Technical Parameters
| Item | Value | Unit |
|---|---|---|
| Batch Capacity | 5-50 | kg/batch |
| Deposition Temp. | 400-1100 | ℃ |
| Temp. Accuracy | ±2 | ℃ |
Interested in "SR-M Pilot-scale FBCVD Reactor"? Contact us for selection advice & quotation.
Send Inquiry