FBCVD Reactor Delivered for a Si-C Anode Pilot Line
New Energy MaterialsProject Background
A new energy materials company developing silicon-carbon anode materials needed pilot-scale verification of fluidized bed CVD process to support production investment decisions.
Requirements
| Requirement | Specification |
|---|---|
| Batch capacity | 5-50 kg/batch |
| Deposition temp | 400-650℃ adjustable |
| Temp uniformity | ±2℃ |
| Gas compatibility | Silane/ethylene/propylene/N2/Ar |
| Data acquisition | Temp, pressure, flow, tail gas |
| Safety | Silane interlock, tail gas treatment |
Delivery
SR-M pilot-scale FBCVD reactor system including:
- Reactor body: dia. 300mm, height 2000mm, 316L SS
- Heating: 3-zone control, 25kW
- Gas system: 6-channel MFCs with silane-dedicated lines
- Tail gas: water scrubber + combustion + activated carbon
- Safety: silane leak detection, pressure interlock, emergency purge
- Data: touchscreen HMI with data export
Results
| Metric | Design | Actual |
|---|---|---|
| Temp uniformity | ±3℃ | ±1.8℃ |
| Deposition rate | 0.5-2 nm/min | 0.8-1.8 nm/min |
| Coating uniformity | CV<5% | CV=3.2% |
| Batch repeatability | CV<8% | CV=5.1% |
| Safety record | Zero incidents | Zero incidents |