Delivery of Powder Atomic Layer Deposition (FB-ALD) System for a New-Energy Materials Company
新能源/粉体材料
Project Background
A new-energy/powder materials company needed atomic-level uniform coating capability for high-value powder products. Traditional liquid-phase coating offers limited uniformity, so a fluidized-bed powder atomic layer deposition (FB-ALD) system was introduced for atomic-level thickness-controlled, highly isotropic surface coating.
Project Parameters
| Parameter | Value |
|---|---|
| Equipment type | Fluidized-bed powder ALD (FB-ALD) |
| Applicable powder | D50 = 2-1000 μm |
| Deposition temperature | By precursor (approx. 100-400℃) |
| Coating uniformity | Atomic-level, highly isotropic |
| Scale | Lab-scale / production-scale |
| Control | PLC + process parameter recording |
Implementation
Delivered an FB-ALD fluidized-bed reactor with precursor supply, fluidization gas lines, temperature control and exhaust treatment. Powder forms a fluidized state in the reactor; precursors are pulsed alternately to achieve atomic-level deposition on particle surfaces with uniform, thickness-controlled coating. Key milestones: equipment fabrication (months 1-2), installation (month 3), commissioning and process validation (months 4-5), acceptance (month 6).
Results
| Indicator | Target | Actual |
|---|---|---|
| Coating uniformity | Atomic-level uniform | Met |
| Batch stability | Good | Met |
| Thickness control | Yes | Met |
| Scale match | Matches process | On-spec |
Customer feedback: FB-ALD coating is uniform and batch-stable, meeting high-value powder preparation requirements.