Fluidized Bed CVD for Si-C Anodes: Process Principles and Equipment Selection

The core of CVD Si-C anode production is depositing nano-silicon on porous carbon skeletons followed by carbon coating. Fluidized bed reactors become the mainstream scale-up equipment due to sufficient gas-solid contact and uniform particle heating. Key selection points: fluidization velocity window (avoiding agglomeration and elutriation), temperature uniformity (±2℃ control), batch capacity and continuous capability, and safety interlocks for silane. This article gives lab-pilot-production scale-up selection advice based on FB-CVD parameter effects.