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Fluidized Bed CVD Reactor (FBCVD): Structure and Working Principle

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Fluidized Bed CVD Reactor

FBCVD keeps powder particles fluidized by gas flow while precursor deposits uniformly onto particle surfaces at high temperature, used for silicon-carbon anodes, carbon nanotubes and coating modification.

Key Systems

  • Reactor body & lining — uniform fluidization and temperature resistance.
  • Gas delivery — precise control of carrier/reactant/precursor flows.
  • Heating & control — zoned, uniform temperature field.
  • Exhaust treatment — cooling, capture and compliant discharge.

Keywords: fluidized bed CVD, FBCVD, silicon-carbon anode, chemical vapor deposition, Henan Songrui

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