Fluidized Bed CVD Reactor (FBCVD): Structure and Working Principle
Fluidized Bed CVD Reactor
FBCVD keeps powder particles fluidized by gas flow while precursor deposits uniformly onto particle surfaces at high temperature, used for silicon-carbon anodes, carbon nanotubes and coating modification.
Key Systems
- Reactor body & lining — uniform fluidization and temperature resistance.
- Gas delivery — precise control of carrier/reactant/precursor flows.
- Heating & control — zoned, uniform temperature field.
- Exhaust treatment — cooling, capture and compliant discharge.
Keywords: fluidized bed CVD, FBCVD, silicon-carbon anode, chemical vapor deposition, Henan Songrui
