河南嵩瑞新型耐材有限公司
流化床气相沉积反应器FBCVD设备

SR-M Pilot-scale FBCVD Reactor

Pilot FBCVD reactor with wide adjustable parameter ranges for process validation and scale-up, bridging lab and production.

单炉处理量5-50 kg/批
沉积温度400-1100 ℃
控温精度±2 ℃

Product Introduction

Positioning

The SR-M series serves pilot scale-up needs of research institutes and material companies, with 5-50 kg batch capacity reproducing production-reactor flow and temperature fields.

Features

  • Wide adjustable ranges of temperature, gas flow and pressure
  • Modular design for quick distributor/internal changes
  • Complete data acquisition for process modeling

Technical Parameters

ItemValueUnit
单炉处理量5-50 kg/批
沉积温度400-1100 ℃
控温精度±2 ℃

FAQ

Yes. Songrui offers process verification on pilot reactors: feedstock testing, parameter optimization, 72h+ stability testing, and verification reports. Fees are deductible from production equipment purchases.

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