
SR-M Pilot-scale FBCVD Reactor
Pilot FBCVD reactor with wide adjustable parameter ranges for process validation and scale-up, bridging lab and production.
| 单炉处理量 | 5-50 kg/批 |
| 沉积温度 | 400-1100 ℃ |
| 控温精度 | ±2 ℃ |
Product Introduction
Positioning
The SR-M series serves pilot scale-up needs of research institutes and material companies, with 5-50 kg batch capacity reproducing production-reactor flow and temperature fields.
Features
- Wide adjustable ranges of temperature, gas flow and pressure
- Modular design for quick distributor/internal changes
- Complete data acquisition for process modeling
Technical Parameters
| Item | Value | Unit |
|---|---|---|
| 单炉处理量 | 5-50 kg/批 | |
| 沉积温度 | 400-1100 ℃ | |
| 控温精度 | ±2 ℃ |
FAQ
Yes. Songrui offers process verification on pilot reactors: feedstock testing, parameter optimization, 72h+ stability testing, and verification reports. Fees are deductible from production equipment purchases.
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