FBCVD Supporting Systems (Gas/Tail-gas/Temp.)
Gas supply, tail gas treatment and temperature control systems for FBCVD reactors, ensuring safe, clean and stable operation.
| Gas Channels | 2-12 ch |
| MFC Accuracy | ±1 %FS |
Product Introduction
Scope
- Gas supply: multi-channel MFC control with precise silane/carbon/carrier ratios
- Tail gas treatment: combustion tower, spray absorption, dedusting for compliance
- Temperature control: multi-zone heating/cooling with programmed ramps
Value
Integrated design and delivery with reactors reduces interface risks and shortens on-site commissioning.
Technical Parameters
| Item | Value | Unit |
|---|---|---|
| Gas Channels | 2-12 | ch |
| MFC Accuracy | ±1 | %FS |
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