FBCVD Supporting Systems (Gas/Tail-gas/Temp.)
Gas supply, tail gas treatment and temperature control systems for FBCVD reactors, ensuring safe, clean and stable operation.
| 气路数 | 2-12 路 |
| MFC精度 | ±1 %FS |
Product Introduction
Scope
- Gas supply: multi-channel MFC control with precise silane/carbon/carrier ratios
- Tail gas treatment: combustion tower, spray absorption, dedusting for compliance
- Temperature control: multi-zone heating/cooling with programmed ramps
Value
Integrated design and delivery with reactors reduces interface risks and shortens on-site commissioning.
Technical Parameters
| Item | Value | Unit |
|---|---|---|
| 气路数 | 2-12 路 | |
| MFC精度 | ±1 %FS |
FAQ
Weekly filter inspection, monthly spray nozzle cleaning, quarterly analyzer calibration, semi-annual burner and refractory inspection, and regular activated carbon replacement.
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